Semiconductor device with fuse and method for fabricating...

Details Semiconductor device with fuse and method for fabricating... Semiconductor device with fuse and method for fabricating...

2011-04-12

2011-04-12

Smith, Matthew S (Department: 2823)

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

Using structure alterable to nonconductive state

C438S601000, C257S529000, C257SE21001

Reexamination Certificate

active

07923307

ABSTRACT:
A method for fabricating a semiconductor with a fuse includes providing a substrate, forming an insulation layer over the substrate, forming a polysilicon hard mask over the insulation layer, forming a first mask pattern to form a fuse over the polysilicon hard mask, and removing the polysilicon hard mask exposed by the first mask pattern to form a portion of the polysilicon hard mask into a polysilicon fuse.

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