Semiconductor device with field plate

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Details

357 68, 357 38, 357 49, H01L 2952, H01L 2712, H01L 29743

Patent

active

046546910

ABSTRACT:
Field plates for relaxing electric fields are provided for an active element in a semiconductor integrated circuit. A field plate integral with an electrode making ohmic contact with an elongated strip shaped diffusion region and extending beyond a pn-junction formed between the diffusion region and an adjacent region to surround the pn-junction has a larger width at its opposite ends than a width at its linear portions. A high breakdown voltage can be obtained by thus configuring the field plate without changing the diffusion region in size.

REFERENCES:
patent: 3538398 (1970-11-01), Whiting
patent: 4412242 (1983-10-01), Herman et al.

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