Semiconductor device with contact stabilization between...

Details Semiconductor device with contact stabilization between... Semiconductor device with contact stabilization between...

2011-01-25

2011-01-25

Tran, Tan N (Department: 2826)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

C438S171000, C438S190000, C438S210000, C438S238000, C438S239000, C438S244000, C438S329000, C438S396000

Reexamination Certificate

active

07875526

ABSTRACT:
A semiconductor device includes a semiconductor substrate divided into a cell array region, a core region, and a peripheral region. Bit lines are formed in the respective regions. Storage node contact plugs are formed in the cell array region, and blocking patterns are simultaneously formed around the bit lines of the core region and the peripheral region. Capacitors are formed in the cell array region to come into contact with the storage node contact plugs, and metal contact plugs are formed to come into contact with the capacitors of the cell array region and the bit lines of the core region and the peripheral region. In the semiconductor device, even if the metal contact plugs are not aligned with the bit lines, the blocking pattern works to stabilize the contact between the metal contact plugs and the bit lines.

REFERENCES:
patent: 2002/0135004 (2002-09-01), Uh et al.

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