Semiconductor device with alignment mark

Details Semiconductor device with alignment mark Semiconductor device with alignment mark

2006-04-25

2006-04-25

Tran, Thien F. (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C438S462000

Reexamination Certificate

active

07034406

ABSTRACT:
A semiconductor device includes an alignment mark arranged on a surface, and including a high reflectance portion and a flat low reflectance portion; and a first silicon oxide film formed internally and provided with a plurality of first embedded portions filled with a material different from a material of portions around the embedded portions. The first embedded portions are formed in at least a portion of a region avoiding a portion shaded by projecting the high reflectance portion onto the silicon oxide film.

REFERENCES:
patent: 5528372 (1996-06-01), Kawashima
patent: 6858948 (2005-02-01), Van Haren
patent: 7-335721 (1995-12-01), None
patent: 2001-168194 (2001-06-01), None

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