Semiconductor device with acceleration sensor

Details Semiconductor device with acceleration sensor Semiconductor device with acceleration sensor

2006-09-14

2009-06-02

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

C073S514160

Reexamination Certificate

active

07540190

ABSTRACT:
A semiconductor device includes a package having a cavity in the interior thereof, a support member that extends out from a face of the cavity, and a semiconductor element fixed to the support member without contacting the faces that form the cavity.

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patent: 7019231 (2006-03-01), Ishikawa et al.
patent: 7322239 (2008-01-01), Kurogi
patent: 7331230 (2008-02-01), Takeyari et al.
patent: 2004-309188 (2004-11-01), None
patent: 2005-127750 (2005-05-01), None

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