Semiconductor device with a toroidal-like junction

Details Semiconductor device with a toroidal-like junction Semiconductor device with a toroidal-like junction

2007-06-19

2007-06-19

Nguyen, Thanh (Department: 2813)

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

C438S365000, C438S366000, C438S368000

Reexamination Certificate

active

10680355

ABSTRACT:
Formation of elements of a vertical bipolar transistor is described, in particular a vertical npn transistor formed on a p-type substrate. Accordingly, an improved method not limited by constraints of photolithography, and an ensuing device made by such methods, is described. A temporary spacer (e.g., an oxide spacer) is deposited over a dielectric separation layer. The temporary spacer and dielectric separation layers are then anisotropically etched, forming a dielectric “boot shape” on a lower edge of the dielectric separation layer. An area within this non-photolithographically produced boot region defines an emitter contact window. Since the boot tip is formed through deposition and etching techniques, the emitter window is automatically aligned (i.e., self-aligned) with an underlying base region. Feature sizes are determined by deposition and etching techniques. Consequently, photolithography of small features is eliminated.

REFERENCES:
patent: 5026663 (1991-06-01), Zdebel et al.
patent: 5067002 (1991-11-01), Zdebel et al.
patent: 5512785 (1996-04-01), Haver et al.

Affiliated with

Also associated with

Rating

Semiconductor device with a toroidal-like junction does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device with a toroidal-like junction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device with a toroidal-like junction will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3845185