Semiconductor device with a contact plug connected to...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration

Reexamination Certificate

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C257S775000, C257SE23145

Reexamination Certificate

active

07923843

ABSTRACT:
Two interconnect layers are electrically connected while reducing the number of manufacturing steps. A contact plug9cwhich is formed into a beaded shape in a layer underlying two interconnects11C and11D and which also electrically connects the two interconnects11C and11D is included. The two interconnects11C and11D are separated to each other and are formed in a same layer. The contact plug9cis simultaneously formed with a contact plug9bto be connected to an interconnect4band a contact plug9ato be connected to a source/drain region6.

REFERENCES:
patent: 5600170 (1997-02-01), Sugiyama et al.
patent: 6291305 (2001-09-01), Huang et al.
patent: 6495874 (2002-12-01), Kawamura et al.
patent: 6657247 (2003-12-01), Yoshiyama et al.
patent: 6661095 (2003-12-01), Ukita
patent: 2002/0173096 (2002-11-01), Okudaira
patent: 2003/0205738 (2003-11-01), Kanaya et al.
patent: 8-181205 (1996-07-01), None
patent: 2000-164812 (2000-06-01), None
patent: 2002-33389 (2002-01-01), None
patent: 2002-353328 (2002-12-01), None
patent: 2003-243522 (2003-08-01), None
patent: 2006-19371 (2006-01-01), None
Chinese Office Action dated Jun. 12, 2009 (with partial English translation).

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