Semiconductor device with a cavity therein and a method of...

Details Semiconductor device with a cavity therein and a method of... Semiconductor device with a cavity therein and a method of...

2006-03-07

2006-03-07

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

C257S499000, C257S506000

Reexamination Certificate

active

07009273

ABSTRACT:
A semiconductor device includes a semiconductor substrate, cavities, and an element isolating region. The cavities, which are each shaped like a flat plate, are made in the semiconductor substrate. The element isolating region is formed in the surface of the semiconductor substrate and located at the sides of the cavities.

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U.S. Appl. No. 09/650,748, filed Aug. 30, 2000, Sato et al.

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