Semiconductor device using piezoelectric actuator formed by...

Details Semiconductor device using piezoelectric actuator formed by... Semiconductor device using piezoelectric actuator formed by...

2005-11-22

2008-11-04

San Martin, J. A (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S331000, C310S332000, C977S712000, C977S724000, C977S732000, C977S837000

Reexamination Certificate

active

07446457

ABSTRACT:
A semiconductor device includes beam portions and piezoelectric portions. Each of the beam portions is formed to extend in a first direction with one end fixed at a substrate by use of a supporting member and warped by residual stress with the supporting member set as a starting point. Each of the piezoelectric portions is connected to the other end of the corresponding beam portion and formed to extend in a second direction intersecting with the first direction and moves parallel to the substrate in a first direction and in a direction opposite to the first direction by application of bias voltage.

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