Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-03-08
2005-03-08
Tokar, Michael (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S757020
Reexamination Certificate
active
06864695
ABSTRACT:
Since each wiring line is formed on one surface of the associated beam at a prescribed width over the entire length of the beam, the beam has the same sectional shape taken in the width direction at any point along an arbitrary longitudinal direction of the beam. As a result, the second moment of area, which is determined by the shapes of the beam and the wiring line, is uniform. This prevents a problem of the curvature of a beam varying locally when the beam is bent by a prescribed amount due to contact of the probe with a pad of a subject body. This, in turn, prevents local concentration of stress in the beams and thereby prevents breakage of the beam. Therefore, the probe structure can be miniaturized while the strength of the beams is kept at a required level, whereby a semiconductor device testing apparatus capable of accommodating many probes can be realized.
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Korean Patent Office Action dated Feb. 28, 2004.
Ban Naoto
Kanamaru Masatoshi
Kohno Ryuji
Miura Hideo
Shimizu Hiroya
Antonelli Terry Stout & Kraus LLP
Nguyen Trung Q.
Renesas Technology Corp.
Tokar Michael
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