Semiconductor device tester capable of simultaneously testing a

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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324765, G01R 104

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active

054732590

ABSTRACT:
In an IC tester configured to simultaneously test a plurality of test ICs, each of the test ICs includes a temperature sensor part for detecting the temperature of the test IC itself. A controller receives a temperature detection signal from each test IC and controls a plurality of pulse generators each provided for supplying a pulse signal to a corresponding one of the test ICs. Each pulse generator is controlled by the controller to change the frequency of the pulse signal so as to maintain the temperature of the corresponding test IC at a target temperature in common to all the test ICs to permit simultaneous testing in the IC tester.

REFERENCES:
patent: 4881591 (1989-11-01), Rignabl
patent: 5233161 (1993-08-01), Farewell et al.
patent: 5406212 (1995-04-01), Hashinaga et al.
patent: 5414370 (1995-05-01), Hashinaga et al.

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