Semiconductor device, stacked semiconductor device, methods...

Details Semiconductor device, stacked semiconductor device, methods... Semiconductor device, stacked semiconductor device, methods...

2006-11-14

2006-11-14

Sarkar, Asok Kumar (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

Multiple housings

C257SE23085, C438S109000

Reexamination Certificate

active

07135762

ABSTRACT:
A semiconductor device including: a semiconductor substrate having an integrated circuit and a penetrating hole; an insulating layer formed on an inner surface of the penetrating hole; and a conductive section formed on the insulating layer to penetrate the semiconductor substrate and having a recess on an end surface.

REFERENCES:
patent: 6429096 (2002-08-01), Yanagida
patent: 6660545 (2003-12-01), Furusawa
patent: 2000-277689 (2000-10-01), None
patent: 2000-311982 (2000-11-01), None
patent: A 2001-135780 (2001-05-01), None

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