Semiconductor device production

Details Semiconductor device production Semiconductor device production

1978-12-15

1980-02-26

Ozaki, G.

Metal treatment

Compositions

Heat treating

148171, 148188, H01L 21225

Patent

active

041904672

ABSTRACT:
A thermal gradient zone melting technique is provided for eliminating distortion of the migrated metal pattern by including a peripheral ring of the metal adjacent the edge of the semiconductor wafer.

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