Semiconductor device of MOS structure having p-type gate electro

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

257756, 257914, H01L 2904, H01L 29167, H01L 29207, H01L 29227

Patent

active

051895048

ABSTRACT:
A semiconductor device of a MOS structure having a p-type gate electrode has a gate electrode including at least two layers consisting of a boron-doped polysilicon layer and a polysilicon layer doped with boron and an inert material. This inert material is nitrogen or carbon.

REFERENCES:
patent: 4074300 (1978-02-01), Sakai et al.
patent: 4180826 (1979-12-01), Shappir
patent: 4267011 (1981-05-01), Shibata et al.
patent: 4309224 (1982-01-01), Shibata
patent: 4558338 (1985-12-01), Sakata
patent: 4601778 (1986-07-01), Robb
patent: 4755865 (1988-07-01), Wilson et al.
patent: 4772927 (1988-09-01), Saito et al.
T. Hori, "Demands for Submicron MOSFET's and Nitrided Oxide Gate-Dielectrics", Extended Abstracts of the 21st Conference on Solid State Devices and Materials, Tokyo, 1989, pp. 197-200.
J. M. Sung et al., "Fluorine Effect on Boron Diffusion of P+ Gate Devices", 1989 IEDM89, pp. 447-450.
I. Kato et al., "Ammonia-Annealed SiO.sub.2 Films for Thin-Gate Insulator", Japanese Journal of Applied Physics, vol. 21 (1982) Supplement 21-1, pp. 153-158.
F. K. Baker et al., "The Influence of Fluorine on Threshold Voltage Instabilities in P.sup.+ Polysilicon Gated P-Channel MOSFETs", 1989 DEDM89, pp. 443-446.
J. Y. C. Sun et al., "Study of Boron Penetration Through Thin Oxide with P.sup.+ -Polysilicon Gate", Digest of the International Symposium on VLSI Technology (1989), pp. 17-18.
M. Miyake et al., "Subquarter-Micrometer Gate-Length p-Channel and n-Channel MOSFET's with Extremely Shallow Source-Drain Junctions", IEEE Transactions on Electron Devices, vol. 36, No. 2, Feb. 1989, pp. 392-397.
N. Kasai et al., "0.25 .mu.m CMOS Technology Using P.sup.+ Polysilicon Gate PMOSFET", 1987, IEDM87, pp. 367-370.
E. N. Mokhov et al., "Constant-Concentration Diffusion of Boron in Silicon Carbide", Sov. Phys. Solid State 30(1), Jan. 1988, pp. 140-141.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor device of MOS structure having p-type gate electro does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device of MOS structure having p-type gate electro, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device of MOS structure having p-type gate electro will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2209559

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.