Measuring and testing – Volume or rate of flow – Thermal type
Patent
1985-09-06
1987-09-29
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
338308, 338319, 357 55, G01F 168
Patent
active
046961887
ABSTRACT:
A semiconductor device comprising a semiconductor body having a depression formed into the first surface of the body. The device further comprises member means comprising first and second thermal-to-electric transducer or static electric element, the member means having a predetermined configuration suspended over the depression. The member means is connected to the first surface at least at one location, the depression opening to the first surface around at least a portion of the predetermined configuration. The depression provides substantial physical and thermal isolation between the elements and the semiconductor body. In this manner, an integrated semiconductor device provides an environment of substantial physical and thermal isolation between the transducer or element and the semiconductor body.
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Goldstein Herbert
Honeywell Inc.
Mersereau Charles G.
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