Semiconductor device, method for manufacturing semiconductor...

Details Semiconductor device, method for manufacturing semiconductor... Semiconductor device, method for manufacturing semiconductor...

2011-06-28

2011-06-28

Young, Christopher G (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S296000, C430S942000, C716S054000

Reexamination Certificate

active

07968259

ABSTRACT:
In a multi-project-chip semiconductor device, semiconductor elements fabricated on a wafer have a layout that corresponds to an exposure order of a pattern of the semiconductor elements and that is based on information indicating manufacture conditions and the number of shots and are arranged such that the semiconductor elements having the same manufacture condition are adjacent to each other in ascending or descending order of the number of shots.

REFERENCES:
patent: 6560768 (2003-05-01), Inanami et al.
patent: 8-316131 (1996-11-01), None
patent: 2000-269126 (2000-09-01), None
patent: 2001-93799 (2001-04-01), None
patent: 2003-332205 (2003-11-01), None
patent: 2005-101405 (2005-04-01), None

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