Semiconductor device, method for fabricating an electrode,...

Details Semiconductor device, method for fabricating an electrode,... Semiconductor device, method for fabricating an electrode,...

2011-08-09

2011-08-09

Huynh, Andy (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S022000, C438S602000, C438S604000, C257S103000, C257S189000, C257S744000, C257S745000, C257SE21172, C257SE29143, C257SE29144

Reexamination Certificate

active

07993948

ABSTRACT:
A method for fabricating an electrode by (i) depositing a palladium film on a p-type semiconductor layer; (ii) introducing an oxygen gas onto the palladium film to provide an oxygen ambient; (iii) oxidizing the palladium film adjacent to the semiconductor layer by annealing the palladium film in the oxygen ambient; and (iv) forming a palladium oxide film directly in contact with the semiconductor layer.

REFERENCES:
patent: 5387459 (1995-02-01), Hung
patent: 6239490 (2001-05-01), Yamada et al.
patent: 6586328 (2003-07-01), Adesida et al.
patent: 7009218 (2006-03-01), Sugimoto et al.
patent: 7323724 (2008-01-01), Sugimoto et al.
patent: 2002/0036286 (2002-03-01), Ho et al.
patent: 2003/0034732 (2003-02-01), Aoki et al.
patent: 2004/0159836 (2004-08-01), Sugimoto et al.
patent: 2007/0029568 (2007-02-01), Choo et al.
patent: 1523684 (2004-08-01), None
patent: 1 033 355 (2000-09-01), None
patent: 1 450 414 (2004-08-01), None
patent: 7-153700 (1995-06-01), None
patent: 2001-85736 (2001-03-01), None
patent: 3230463 (2001-09-01), None
patent: 3233258 (2001-09-01), None
patent: 10-2005-0020339 (2005-03-01), None
patent: 514622 (2002-12-01), None
patent: 567516 (2003-12-01), None
patent: 2004 047189 (2004-06-01), None
patent: 2006 014996 (2006-02-01), None

Affiliated with

Also associated with

Rating

Semiconductor device, method for fabricating an electrode,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device, method for fabricating an electrode,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device, method for fabricating an electrode,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2735533