Semiconductor device, manufacturing method therefor, and...

Details Semiconductor device, manufacturing method therefor, and... Semiconductor device, manufacturing method therefor, and...

2005-03-01

2005-03-01

Everhart, Caridad (Department: 2825)

Semiconductor device manufacturing: process

Making passive device

Resistor

C438S308000, C438S048000, C117S004000

Reexamination Certificate

active

06861328

ABSTRACT:
An a-Si film is patterned into a linear shape (ribbon shape) or island shape on a glass substrate. The upper surface of the a-Si film or the lower surface of the glass substrate is irradiated and scanned with an energy beam output continuously along the time axis from a CW laser in a direction indicated by an arrow, thereby crystallizing the a-Si film. This implements a TFT in which the transistor characteristics of the TFT are made uniform at high level, and the mobility is high particularly in a peripheral circuit region to enable high-speed driving in applications to a system-on glass and the like.

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