Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate
2006-07-19
2008-03-04
Coleman, David W. (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
C430S005000
Reexamination Certificate
active
07339247
ABSTRACT:
A method of manufacturing a semiconductor device is disclosed, which comprises setting a stencil mask above a substrate to be processed in confronting to the substrate, the stencil mask having an opening, and irradiating the substrate with charged particles through the opening of the stencil mask, while adjusting a potential difference between the stencil mask and the substrate depending on a value of a current flowing between the substrate and the stencil mask.
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Notification for Filing Opinion from the Korean Intellectual Property Office, dated Jul. 19, 2005, in Patent Application No. 10-2003-96719 and English translation thereof.
Office Action from the Taiwan Intellectual Property Office dated Mar. 3, 2005 in Taiwanese Patent Application No. 092135566, and English translation.
Misawa Hisanori
Shibata Takeshi
Suguro Kyoichi
Coleman David W.
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
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