Semiconductor device manufacturing apparatus

Details Semiconductor device manufacturing apparatus Semiconductor device manufacturing apparatus

1991-09-30

1993-09-14

Reynolds, Bruce A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392416, 392418, 118724, 432239, 414150, F27D 1502, H01L 2122

Patent

active

052451585

ABSTRACT:
A semiconductor device manufacturing apparatus has a heat retaining tube which can be freely placed in and pulled out of a processing chamber of the apparatus. When located within the processing chamber, the heat retaining tube surrounds a boat with the semiconductor wafers mounted thereon. After the thermal processing of the semiconductor wafers has been completed, the heat retaining tube and the semiconductor wafers are pulled out of the processing chamber together. In this way, the difference in the temperature of the center and periphery of the semiconductor wafer is decreased, and semiconductor devices, which have excellent performance and which are free from crystalline defects or dislocation, can thus be manufactured.

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