Semiconductor device manufacturing apparatus

Details Semiconductor device manufacturing apparatus Semiconductor device manufacturing apparatus

1997-11-05

2000-02-08

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

H01L 2130

Patent

active

060230681

ABSTRACT:
An apparatus for semiconductor device manufacture is disclosed, which apparatus includes first and second, different exposure systems each for forming an image of a circuit pattern on a substrate coated with a photosensitive material, and a stationary member for supporting the first and second exposure systems.

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patent: 5050111 (1991-09-01), Ayata et al.
patent: 5083032 (1992-01-01), Suzuki

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