Facsimile and static presentation processing – Facsimile – Specific signal processing circuitry
Patent
1987-12-03
1989-10-03
Peng, John K.
Facsimile and static presentation processing
Facsimile
Specific signal processing circuitry
358107, 350511, 350515, 356237, 356394, H04N 718
Patent
active
048720526
ABSTRACT:
A semiconductor device inspection system capable of objectively accomplishing visual image inspection of a semiconductor device and minimizing error in the inspection, to thereby effectively carry out the inspection with high accuracy and at high speed. The system includes a low magnification image pickup mechanism which consists of a plurality of low magnification image pickup units each carrying out low magnification image pickup of a semiconductor device to generate an image signal. The system also includes a signal processing system for processing the image signal to judge the correctness of the semiconductor device. In the image pickup units, their light receptors are each arranged in parallel to an inspected surface of the semiconductor device and their central axes intersect together on the inspected surface. The system may also include a high magnification image pickup unit consisting of a high magnification image pickup mechanism and a light-permeable element retractably positioned between the unit and a semiconductor device to be inspected.
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Kamiharako Takashi
Liudzius Valerie A.
Uramoto Iwami
Weisner Ralph M.
Kaijo Denki Co. Ltd.
Peng John K.
View Engineering, Inc.
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