Semiconductor device inspection apparatus using a plurality of r

Details Semiconductor device inspection apparatus using a plurality of r Semiconductor device inspection apparatus using a plurality of r

1990-05-18

1991-08-27

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356392, G01N 2186

Patent

active

050435892

ABSTRACT:
An improved optical inspection apparatus, especially suited for inspecting semiconductor devices using a single camera. A highly polished mirrored stage is provided with a light source extending upwardly therethrough and providing a pedestal upon which the object to be inspected is centered. A plurality of stationary reflectors are disposed around the stage and function in concert with two separate movable reflectors to provide optical scanning over the appropriate surface portions of the device. A separate movable reflector system is used to maintain a constant focal path length between the device and the camera as the other movable reflectors scan the device, thus ensuring proper focus and measurement accuracy.

REFERENCES:
patent: 4269515 (1981-05-01), Altman
patent: 4471448 (1984-09-01), Williams
patent: 4855928 (1989-08-01), Yamanaka

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