Semiconductor device inspection apparatus and inspection method

Details Semiconductor device inspection apparatus and inspection method Semiconductor device inspection apparatus and inspection method

2005-06-14

2005-06-14

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010

Reexamination Certificate

active

06906546

ABSTRACT:
Semiconductor device inspection apparatus suitable for inspecting narrow-pitched semiconductor devices and an inspection method. The apparatus has a wafer stage, a base table, an X stage, a Y stage, an elevation unit mounted on the Y stage and elevates the wafer stage up and down, a rotary unit which turns the wafer stage, a vibration elimination table which reduces vibration of the base table, a probe card having plural probe needles which electrically contact plural electrodes when the wafer stage moves upward, and a probe card holder where the probe card is to be placed. The heights of needles of the probe card are detected by a laser displacement meter. Images of a wafer and the needles are sensed by a camera. Based on image information, positions of the wafer and probe card are computed and the X stage, Y stage and elevation unit are controlled.

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patent: 5436571 (1995-07-01), Karasawa
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patent: 9-330960 (1997-12-01), None
patent: 2000-26082 (2000-01-01), None

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