Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate
2007-08-07
2007-08-07
Jackson, Jerome (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified configuration
C257S758000, C257S774000, C257S900000, C257SE23142, C257SE23145
Reexamination Certificate
active
09050113
ABSTRACT:
The semiconductor device comprises a semiconductor substrate10,a conducting film20formed on the semiconductor substrate10and including two conductor patterns adjacent to each other; an etching stopper film covering the upper surface of the conducting film20;an insulation film28which includes a contact hole which reaches the semiconductor substrate10between the two conductor patterns and the an end of which is positioned on the etching stopper film22on the two conductor patterns; and a sidewall insulation film32formed on the side walls of the conducting film20and of the etching stopper film22in the contact hole. The fluctuation of a contact hole size due to disalignment of the lithography can be restrained, and in the lithography step of opening the contact hole, the photoresist can have a large openings size, which facilitate the lithography step.
REFERENCES:
patent: 5498889 (1996-03-01), Hayden
patent: 5698902 (1997-12-01), Uehara et al.
patent: 5728595 (1998-03-01), Fukase
patent: 5977583 (1999-11-01), Hosotani et al.
patent: 6078073 (2000-06-01), Habu et al.
patent: 6127734 (2000-10-01), Kimura
patent: 8-37181 (1996-02-01), None
patent: 08037181 (1996-02-01), None
Fujitsu Limited
Jackson Jerome
Warren Matthew E.
Westerman, Hattori, Daniels & Adrian , LLP.
LandOfFree
Semiconductor device including contact holes between... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor device including contact holes between..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device including contact holes between... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3900325