Semiconductor device including bipolar transistor with step impu

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure – With emitter region having specified doping concentration...

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257557, H01L 2900, H01L 2972, H01L 2704

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active

051986922

ABSTRACT:
In a semiconductor device including a bipolar transistor having a base region formed in a collector region, and an emitter region formed in the base region, the emitter region comprises a high concentration region in contact with the base region, and a low concentration region provided between the base region and the high concentration region. The low concentration region is formed by introducing an impurity with a mask including a large opening. In addition, the high concentration region is formed by introducing an impurity with a mask including a small opening.

REFERENCES:
patent: 3585464 (1971-06-01), Castrucci et al.
patent: 4212683 (1980-07-01), Jones et al.
patent: 4833509 (1989-05-01), Hickox
patent: 4935375 (1990-06-01), Kasper et al.
Joshi et al., "Poly Emitter Bipolar Hot Carrier Effects in an Advanced BICMOS Technology", IEDM-87, 1987, pp. 182-185.

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