Semiconductor device including address signal generating...

Details Semiconductor device including address signal generating... Semiconductor device including address signal generating...

2011-07-26

2011-07-26

Nguyen, Ha Tran T (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S762010, C324S754070, C365S201000, C365S230010, C714S733000, C702S117000

Reexamination Certificate

active

07986156

ABSTRACT:
An exemplary aspect of an embodiment of the present invention is a semiconductor device including a plurality of test elements formed in an array on a semiconductor substrate, an address signal generating portion that generates an address signal corresponding to each of the test elements, and a digital-to-analog converter that converts the address signal into an analog signal and outputs the converted analog signal. The present invention enables to recognize which DUT is being measured.

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K.Y.Y. Doong et al., “Field-Configurable Test Structure Array (FC-TSA): Enabling design for monitor model and manufacturability”, Proc. IEEE 2006 ICMTS, 2006, p. 98-103.
S. Saxena et al., “Test Structures and Analysis Techniques for Estimation of the Impact of Layout on MOSFET Performance and Variability”, Proc. IEEE 2004 ICMTS, 2004, p. 263-266.
J. Einfield et al., “A New Test Circuit for the Matching Characterization of npn Bipolar Transistors”, Proc. IEEE 2004 ICMTS, 2004, p. 127-131.

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