Semiconductor device including a pressure sensor

Details Semiconductor device including a pressure sensor Semiconductor device including a pressure sensor

2008-09-11

2010-11-16

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

07832279

ABSTRACT:
A semiconductor device includes a first cavity within a semiconductor substrate and a second cavity within the semiconductor substrate. The second cavity is open to an atmosphere and defines a first lamella between the first cavity and the second cavity. The semiconductor device includes a first sense element configured for sensing a pressure on the first lamella.

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