Semiconductor device including a main alignment mark having peri

Details Semiconductor device including a main alignment mark having peri Semiconductor device including a main alignment mark having peri

1997-02-06

1999-01-12

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

438401, H01L 23544

Patent

active

058594787

ABSTRACT:
In a semiconductor device having alignment marks formed on a semiconductor substrate, the alignment marks include a main convex or concave alignment mark formed on said semiconductor substrate; and a plurality of minute alignment marks formed on the periphery of the main alignment mark. In areas where the minute alignment marks are formed, even when a film of aluminum or its alloy is stacked on the semiconductor substrate by high temperature sputtering, grains will not grow so as to have a large diameter. Thus, the grains created on the periphery of the main alignment mark are not erroneously recognized as the main alignment mark, thereby realizing accurate alignment.

REFERENCES:
patent: 5532520 (1996-07-01), Haraguchi et al.
patent: 5700732 (1997-12-01), Jost et al.

Affiliated with

Also associated with

Rating

Semiconductor device including a main alignment mark having peri does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device including a main alignment mark having peri, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device including a main alignment mark having peri will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1519461