Semiconductor device including a capacitance type sensor and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

Reexamination Certificate

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Details

C257S233000, C257S234000, C257S417000

Reexamination Certificate

active

08080835

ABSTRACT:
A semiconductor device of the present invention includes a semiconductor substrate, a semiconductor element formed in the semiconductor substrate, a surface layer formed on the semiconductor substrate, and a capacitance type sensor formed on the surface layer. The surface layer has a planar portion whose surface is planar. The capacitance type sensor includes a lower thin film parallelly opposed to the surface of the planar portion and an upper thin film opposed to the lower thin film at a prescribed interval on the side opposite to the surface layer.

REFERENCES:
patent: 6906529 (2005-06-01), Blanchard
patent: 7068254 (2006-06-01), Yamazaki et al.
patent: 2002/0157475 (2002-10-01), Onose et al.
patent: 2004/0145056 (2004-07-01), Gabriel et al.
patent: 2005/0000932 (2005-01-01), Gabriel et al.
patent: 2009/0045441 (2009-02-01), Kweon et al.
patent: 2009/0047479 (2009-02-01), Nakatani et al.
patent: 2004-223708 (2004-08-01), None
patent: 2006-108491 (2006-04-01), None

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