Semiconductor device header suitable for vacuum tube applicatio

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357 24, 357 74, 357 29, H01L 3902, H01L 2978, G01T 124, H01L 2302

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040443744

ABSTRACT:
A disk shaped ceramic support has a mounting surface provided as a unitary part of the support with conductors extending generally outward from the mounting surface through the thickness dimension of the support, the outer ends of the conductive leads being connected to a ring of terminal leads. A charge coupled device (CCD) imager chip is secured to the mounting surface to leave a backside illumination surface of the chip unobstructed and electrical interconnections are made from terminal pads on the front surface of the chip to the ends of the conductive leads adjacent the mounting surface. A cover plate attached to the insulating support outwardly of the interconnections encloses the front surface of the chip. In a preferred structure the chip is mounted on an apertured molybdenum disk unitarily attached to the support with the illumination surface of the CCD chip facing the aperture. A peripheral tube flange can be brazed to the periphery of the insulating support and a tubular enclosure vacuum sealed to the tube flange for accommodating a photo-cathode source which faces the illumination surface of the imager chip. In a further embodiment, the front side of the chip is attached directly to a mounting surface provided by the insulating support itself, connections between the terminal pads on the chips and the conductive leads of the support being effected therough apertures in the support located adjacent corners of the chip.

REFERENCES:
patent: 3509430 (1970-04-01), Mroz
patent: 3568012 (1971-02-01), Ernst et al.
patent: 3641254 (1972-02-01), Bunting et al.
patent: 3943623 (1976-03-01), Mizutani et al.
Proc. Sym. on CCD Tech. for Scientific Imaging Applications, Cal. Tech., June 1975; Collins et al.
Inter. Conf.-Tech. and Applications of CCD's-Univ. of Edinburgh, Sept. 25-27, 1974; Gray et al.
Inter Conf. on Applications of CCD's-Oct. 29-31, 1975; Barton et al.

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