Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Reexamination Certificate
2011-01-20
2011-11-08
Chambliss, Alonzo (Department: 2892)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
C257S291000, C257S774000, C257SE51005
Reexamination Certificate
active
08053781
ABSTRACT:
The present invention has an object to provide an active-matrix liquid crystal display device that realizes the improvement in productivity as well as in yield. In the present invention, a laminate film comprising the conductive film comprising metallic material and the second amorphous semiconductor film containing an impurity element of one conductivity type and the amorphous semiconductor film is selectively etched with the same etching gas to form a side edge of the first amorphous semiconductor film1001into a taper shape. Thereby, a coverage problem of a pixel electrode1003can be solved and an inverse stagger type TFT can be completed with three photomask. Selected figure is FIG.15.
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Kusuyama Yoshihiro
Suzawa Hideomi
Yamazaki Shunpei
Chambliss Alonzo
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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