Semiconductor device having super junction structure and...

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Bidirectional rectifier with control electrode

Reexamination Certificate

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C257S110000, C257S341000, C257SE29005, C257SE21361

Reexamination Certificate

active

11211524

ABSTRACT:
A semiconductor device includes: a center region; a periphery region; and a semiconductor layer including pairs of a first region having a first impurity amount and a second region having a second impurity amount. The first and the second regions are alternately aligned in a plane. The periphery region includes an utmost outer and an utmost inner periphery pairs. The utmost outer periphery pair has a difference between the second and the first impurity amounts, which is smaller than a maximum difference in the periphery region. The utmost inner periphery pair has a difference between the second and the first impurity amounts, which is larger than a difference in the center region.

REFERENCES:
patent: 6512268 (2003-01-01), Ueno
patent: 6844592 (2005-01-01), Yamaguchi et al.
patent: 2001/0028083 (2001-10-01), Onishi et al.
patent: 2003/0222327 (2003-12-01), Yamaguchi et al.
patent: 2005/0184336 (2005-08-01), Takahashi et al.
patent: 2006/0043480 (2006-03-01), Tsuchitani et al.

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