Active solid-state devices (e.g. – transistors – solid-state diode – Gate arrays – With particular power supply distribution means
Patent
1994-10-06
1996-02-13
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Gate arrays
With particular power supply distribution means
257211, 257758, 257920, H01L 23485, H01L 2940
Patent
active
054913527
ABSTRACT:
At a peripheral area of a semiconductor chip where active elements are not formed, a layer underlying a power supply wiring or ground wiring is provided with an uneven surface. The uneven or corrugated surface at the interface between the wiring and the underlying layer makes the wiring unsusceptible to slide. The uneven surface can be realized by interposing foreign matters between insulating layers, by selectively reducing the thickness of an insulating layer, or by forming openings in an insulating layer.
REFERENCES:
patent: 4914503 (1990-04-01), Shirato et al.
patent: 5117280 (1992-05-01), Adachi
patent: 5287002 (1994-02-01), Freeman, Jr. et al.
Brown Peter Toby
Mintel William
Yamaha Corporation
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