Semiconductor device having overlapping conductor layers and met

Fishing – trapping – and vermin destroying

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437 41, 437 44, H01L 21283

Patent

active

053589009

ABSTRACT:
A semiconductor device includes a semiconductor substrate, an active layer formed on the semiconductor substrate, source and drain electrodes respectively formed on the active layer, a gate electrode formed on the active layer between the source and drain electrodes and including a gate contact portion which makes contact with the active layer and has a thickness greater than those of the source and drain electrodes and an overgate portion which is connected to the gate contact portion and extends over at least a portion of one of the source and drain electrodes, a first insulator layer formed on the active layer and covering the source and drain electrodes and the gate contact portion, a first contact hole in the first insulator layer through which the overgate portion connects to the one of the source and drain electrodes, a second insulator layer formed on the first insulator layer and covering the overgate portion, a second contact hole in the second insulator layer at a position above the overgate portion, and an interconnection layer formed on the second insulator layer and connected to the overgate portion via the second contact hole.

REFERENCES:
patent: 4839309 (1989-06-01), Morikawa
patent: 5100817 (1992-03-01), Cederbaum et al.
patent: 5112765 (1992-05-01), Cederbaum et al.
patent: 5119160 (1992-06-01), Hall
patent: 5252843 (1993-11-01), Suzuki
patent: 5275959 (1994-01-01), Kobayashi et al.
patent: 5286664 (1994-02-01), Horiuchi

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