Semiconductor device having MEMS

Details Semiconductor device having MEMS Semiconductor device having MEMS

2007-04-24

2007-04-24

Lewis, Monica (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

C257SE29324

Reexamination Certificate

active

10664258

ABSTRACT:
In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.

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