Tool changing – Tool transfer to or from matrix – Plural matrices
Reexamination Certificate
2007-12-11
2007-12-11
Smith, Matthew (Department: 2823)
Tool changing
Tool transfer to or from matrix
Plural matrices
C257SE21004, C438S382000, C438S384000
Reexamination Certificate
active
11292633
ABSTRACT:
A semiconductor device includes a semiconductor substrate having a resistor region, an isolation layer disposed in the resistor region, the isolation layer defining active regions, first conductive layer patterns disposed on the active regions, a second conductive layer pattern covering the first conductive layer patterns and disposed on the isolation layer, the second conductive layer pattern and the first conductive layer patterns constituting a load resistor pattern, an upper insulating layer disposed over the load resistor pattern, and resistor contact plugs disposed over the active regions, the resistor contact plugs penetrating the upper insulating layer to contact the load resistor pattern.
REFERENCES:
patent: 5677557 (1997-10-01), Wuu et al.
patent: 6054385 (2000-04-01), Gardner et al.
patent: 6391722 (2002-05-01), Koh
patent: 2005/0056895 (2005-03-01), Shimizu et al.
patent: 11-121719 (1999-04-01), None
patent: 1999-024779 (1999-04-01), None
English language abstract of Korean Publication No. 1999-024779.
English language abstract of Japanese Publication No. 11-121719.
Baek Eun-Jin
Choi Eun-Young
Marger & Johnson & McCollom, P.C.
Singal Ankush
Smith Matthew
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