Semiconductor device having inductor element made of first condu

Details Semiconductor device having inductor element made of first condu Semiconductor device having inductor element made of first condu

1996-11-26

1999-12-14

Dutton, Brian

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

336200, 438381, H01L 2900, H01L 21331, H01F 500

Patent

active

060021616

ABSTRACT:
The semiconductor device includes an inductor element which includes a first conductive film pattern of a spiral configuration formed on a major face of a semiconductor substrate, and second conductive film patterns of an insular configuration electrically connected only to the first conductive film pattern through contact holes formed in an inter-layer insulation film and extending in an overlapping relationship with the first conductive film pattern.

REFERENCES:
patent: 4959631 (1990-09-01), Hasegawa et al.
patent: 5384274 (1995-01-01), Kanehachi
patent: 5610433 (1997-03-01), Merrill et al.
patent: 5793272 (1998-08-01), Burghartz et al.

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