Semiconductor device having improved oxide thickness at a...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including high voltage or high power devices isolated from...

Reexamination Certificate

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C257S502000

Reexamination Certificate

active

07808071

ABSTRACT:
One aspect of a semiconductor device includes an active region located in a semiconductor substrate and having an isolation region located therebetween. The active regions have corners adjacent the isolation region. An oxide layer is located over the active regions and the corners, which may also include edges of the active regions, and a ratio of a thickness of the oxide layer over the corners to a thickness of the oxide layer over the active regions ranges from about 0.6:1 to about 0.8:1. A gate is located over the active region and the oxide layer.

REFERENCES:
patent: 7038291 (2006-05-01), Goda et al.
patent: 7119412 (2006-10-01), Yamamoto
patent: 2008/0180974 (2008-07-01), Shiraishi et al.
patent: 2009/0191688 (2009-07-01), Hu et al.

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