Semiconductor device having improved interconnection wiring stru

Details Semiconductor device having improved interconnection wiring stru Semiconductor device having improved interconnection wiring stru

1993-07-30

1995-04-11

James, Andrew J.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

With means to prevent contact from penetrating shallow pn...

257765, 257771, 257637, H01L 2348, H01L 2946, H01L 2954, H01L 2962

Patent

active

054061210

ABSTRACT:
Disclosed herein is a semiconductor device having a substrate, an insulating layer covering the substrate, a plurality of wiring layer formed on the insulating layer, each wiring layer having a top surface and a side surface, and a sidewall insulating film formed on and along the side surface of each of the wiring layers. The sidewall insulating film suppresses a hillock projecting from the side surface of each wiring layer.

REFERENCES:
patent: 4561009 (1985-12-01), Yonezawa et al.
patent: 5040048 (1991-08-01), Yasue
patent: 5061985 (1991-10-01), Meguro et al.
patent: 5075762 (1991-12-01), Kondo et al.

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