Semiconductor device having improved alignment marks

Details Semiconductor device having improved alignment marks Semiconductor device having improved alignment marks

1996-03-28

1998-07-07

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257620, 356401, H01L 23544

Patent

active

057773920

ABSTRACT:
In a semiconductor device including a plurality of chip areas arranged in a matrix and a grid-like scribe areas a plurality of L-shaped alignment segments and a plurality of pairs of I-shaped alignment segments are provided within the scribe area. Each of the L-shaped alignment segments is located within a first quadrant defined by an X direction center line and a Y direction center line of the scirbe area, and each pair of the I-shaped alignment segments is located within a second quadrant defined by the X direction center line and the Y direction center line adjacent to the first quadrant.

REFERENCES:
patent: 4642672 (1987-02-01), Kitakata
patent: 4893163 (1990-01-01), Rudeck
patent: 4981529 (1991-01-01), Tsujita
patent: 5051807 (1991-09-01), Morozumi

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