Semiconductor device having divided active regions with...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor

Reexamination Certificate

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Details

C257S276000, C257S272000, C257S256000, C257S401000

Reexamination Certificate

active

06900482

ABSTRACT:
A high-frequency semiconductor device for power amplification has a comb-teeth electrode on each of active regions formed on the front surface of the semiconductor substrate. One aspect of the present invention, there is provided a monolithic microwave integrated circuit (MMIC) having a plurality of rectangular-shaped active regions arranged side by side on the front surface of the semiconductor substrate, each of the active regions having interdigited gate, drain and source electrodes thereon which are connected to the respective pads by multilayer interconnection technique. Additionally, the source potential is fed from the back surface of the substrate through a metal plugged via-hole.

REFERENCES:
patent: 5652452 (1997-07-01), Asano
patent: 5852318 (1998-12-01), Chikamatsu et al.
patent: 04-171734 (1992-06-01), None
patent: 05-175247 (1993-07-01), None
patent: 06-005849 (1994-01-01), None
patent: 06-140437 (1994-05-01), None
patent: 08-083808 (1996-03-01), None
patent: 8-250671 (1996-09-01), None
patent: 2000-332030 (2000-11-01), None

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