Semiconductor device having conductive layer and manufacturing m

Details Semiconductor device having conductive layer and manufacturing m Semiconductor device having conductive layer and manufacturing m

1997-12-04

2000-04-04

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257530, 257209, H01L 2900

Patent

active

060464887

ABSTRACT:
A semiconductor device allowing the manufacturing process to be simplified and fine structures therein to be readily formed and a manufacturing method thereof are provided. In the semiconductor device, a conductive layer is used as a mask during etching for forming a first opening.

REFERENCES:
patent: 4853758 (1989-08-01), Fischer
patent: 5235205 (1993-08-01), Lippitt, III
patent: 5365104 (1994-11-01), Godinho et al.
patent: 5454904 (1995-10-01), Ghezzo et al.
patent: 5652459 (1997-07-01), Chen
patent: 5747868 (1998-05-01), Reddy et al.
patent: 5754089 (1998-05-01), Chen

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