Semiconductor device having capacitor and manufacturing apparatu

Details Semiconductor device having capacitor and manufacturing apparatu Semiconductor device having capacitor and manufacturing apparatu

1997-10-09

2000-10-03

Edwards, Laura

Coating apparatus

With means to apply electrical and/or radiant energy to work...

118621, 118627, 118 50, 118 501, 118608, 118612, 118308, 204622, B05B 5057

Patent

active

06126752&

ABSTRACT:
A semiconductor device comprising an integrated circuit and a capacitor. In this capacitor, a bottom electrode, a dielectric film and a top electrode are formed, independently of the integrated circuit, on the interlayer insulating film, and the top electrode and bottom electrode are connected with metal interconnections through contact holes opened in the protective film for protecting the surface of the capacitor. In this constitution, either the top electrode or the bottom electrode is connected the bias line of the integrated circuit, and the other is connected to the ground line, so that extraneous emission may be reduced without having to connect the capacitor outside.

REFERENCES:
patent: 3000752 (1961-09-01), Jackson et al.
patent: 3888207 (1975-06-01), Stutz et al.
patent: 3913523 (1975-10-01), Probst et al.
patent: 3991710 (1976-11-01), Gourdine et al.
patent: 4170193 (1979-10-01), Scholes et al.
patent: 5032422 (1991-07-01), Lamirand et al.

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