Semiconductor device having an improved semiconductor resistor

Details Semiconductor device having an improved semiconductor resistor Semiconductor device having an improved semiconductor resistor

1980-02-11

1982-11-23

Larkins, William D.

357 51, 357 55, 357 56, H01L 2704, H01L 2906, H01C 700

Patent

active

043608221

ABSTRACT:
A semiconductor device such as an integrated Darlington circuit includes a mesa which is bounded by two parallel grooves which extend into the device substrate. A semiconductor resistor is formed in the mesa and extends from the mesa surface down to a buried epitaxial layer. This semiconductor resistor is separated from the grooves by a region of semiconductor material, so that its resistance may be established in an accurate and reproducible manner.

REFERENCES:
patent: 3624454 (1971-11-01), Adkinson
patent: 3659160 (1972-04-01), Sloan, Jr. et al.
patent: 4011580 (1977-03-01), Kasperkovitz
patent: 4100565 (1978-07-01), Khajczadeh et al.
patent: 4118728 (1978-10-01), Berry
patent: 4151541 (1979-04-01), Roger
patent: 4288807 (1981-09-01), Enzlin et al.

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