Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate
2006-09-26
2006-09-26
Parker, Kenneth (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Alignment marks
C257S786000, C257S737000, C257S738000, C438S014000, C438S401000, C438S460000, C438S613000, C228S180210, C228S022000, C279S009100, C451S289000, C451S388000, C118S500000, C118S730000
Reexamination Certificate
active
07112889
ABSTRACT:
A semiconductor device has an alignment mark which can be recognized by a conventional wafer prober. A redistribution layer connects electrodes of the semiconductor device to electrode pads located in predetermined positions of the redistribution layer. Metal posts configured to be provided with external connection electrodes are formed on the electrode pads of the redistribution layer. A mark member made of the same material as the metal posts is formed on the redistribution layer. The mark member serves as an alignment mark located in a predetermined positional relationship with the metal posts.
REFERENCES:
patent: 3627338 (1971-12-01), Thompson
patent: 4693770 (1987-09-01), Hatada
patent: 4906011 (1990-03-01), Hiyamizu et al.
patent: 5381307 (1995-01-01), Hertz et al.
patent: 5497258 (1996-03-01), Ju et al.
patent: 5565988 (1996-10-01), Nara et al.
patent: 5594273 (1997-01-01), Dasse et al.
patent: 5598036 (1997-01-01), Ho
patent: 5657394 (1997-08-01), Schwartz et al.
patent: 5726502 (1998-03-01), Beddingfield
patent: 5729315 (1998-03-01), Takahashi et al.
patent: 5757078 (1998-05-01), Matsuda et al.
patent: 5883435 (1999-03-01), Geffken et al.
patent: 5950070 (1999-09-01), Razon et al.
patent: 6016013 (2000-01-01), Baba
patent: 6034437 (2000-03-01), Shibata
patent: 6271480 (2001-08-01), Yamaguti et al.
patent: 6280308 (2001-08-01), Ishikawa et al.
patent: 6376049 (2002-04-01), Asai et al.
patent: 6429387 (2002-08-01), Kuribayashi et al.
patent: 6456099 (2002-09-01), Eldridge et al.
patent: 03029333 (1991-02-01), None
patent: 06143073 (1994-05-01), None
patent: 09155747 (1997-06-01), None
patent: 11-260768 (1999-09-01), None
patent: WO98/02919 (1998-01-01), None
Office Action from Japanese Patent Office for Application No. 11-321590 mailed Jun. 29, 2004.
Haseyama Makoto
Honda Tetsurou
Itoh Yasuyuki
Maruyama Shigeyuki
Matsuki Hirohisa
Chu Chris C.
Fujitsu Limited
Parker Kenneth
Westerman, Hattori, Daniels & Adrian , LLP.
LandOfFree
Semiconductor device having an alignment mark formed by the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor device having an alignment mark formed by the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device having an alignment mark formed by the... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3562147