Semiconductor device having an alignment mark

Details Semiconductor device having an alignment mark Semiconductor device having an alignment mark

1994-12-13

1995-12-12

Limanek, Robert P.

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257 98, 257774, 257758, 257776, H01L 2348, H01L 23522

Patent

active

054752680

ABSTRACT:
A semiconductor device having an alignment mark which is improved to enable accurate recognition of the alignment mark is provided. A first interconnection layer is provided on a semiconductor substrate. A second interconnection layer is provided on an interlayer insulating film so that first and second interconnection layers cross each other with interlayer insulating film therebetween. A surface of second interconnection layer includes, in a region where first and second interconnection layers cross each other, a flat portion which reflects laser beam vertically and upwardly and a portion including concaves and convexes which reflects laser beam irregularly, which together form an alignment mark.

REFERENCES:
patent: 5027176 (1991-06-01), Saika et al.
patent: 5034799 (1991-07-01), Tomita et al.
patent: 5391921 (1995-02-01), Kudoh et al.

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