Semiconductor device having alignment post electrode and...

Details Semiconductor device having alignment post electrode and... Semiconductor device having alignment post electrode and...

2011-05-17

2011-05-17

Fahmy, Wael M (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

C257S773000, C257SE23179, C438S401000, C438S462000

Reexamination Certificate

active

07944064

ABSTRACT:
A semiconductor device includes a semiconductor substrate which has a plurality of semiconductor device formation regions and alignment mark formation region having the same planar size as that of the semiconductor device formation region, a plurality of post electrodes which are formed in each semiconductor device formation region, and an alignment post electrode which is formed in the alignment mark formation region and smaller in number than the post electrodes formed in each semiconductor device formation region.

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