Semiconductor device having alignment mark

Details Semiconductor device having alignment mark Semiconductor device having alignment mark

1998-03-16

2000-06-27

Meier, Stephen D.

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257798, H01L 21465

Patent

active

060810408

ABSTRACT:
An alignment mark for determining a position of a thin film resistor formed on a semiconductor chip. The alignment mark is disposed on a capacitor formation region of the semiconductor chip. Because aluminum wiring members of the semiconductor chip are not disposed adjacent to the alignment mark within the capacitor formation region, the alignment mark can be precisely recognized. As a result, the position of the thin film resistor can be also precisely determined.

REFERENCES:
patent: 4369557 (1983-01-01), Vandebult
patent: 4642672 (1987-02-01), Kitakata
patent: 5266529 (1993-11-01), Lau et al.
IBM Tech Discl Bul, vol. 32 No. 9b, pp. 74-75, 1990.

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