Semiconductor device having a shielding layer

Details Semiconductor device having a shielding layer Semiconductor device having a shielding layer

2006-05-23

2006-05-23

Parker, Kenneth (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

C257S409000, C257S422000

Reexamination Certificate

active

07049676

ABSTRACT:
The semiconductor device includes a multilevel interconnection formed on a semiconductor substrate. The multilevel interconnection includes a plurality of wiring layers each of which is insulated by an insulating layer. A metal member is formed as a shielding film in a same plane as a wiring layer. As a result, the shielding layer can be formed without increasing the number of process steps.

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